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1994 850 turbo won't idle right after cleaning throttlebody 850

I cleaned my throttle body the other day on my 1994 850 turbo, and now it won't idle right. Seems to idle when warm, will dip down a bit, but will catch itself and come back up, but when cold it sputters and need to feather the throttle to get it up in revs until it's warm, then idles better. Even when warm, it idles too low when put in gear or pulling up to a stop sign, and wants to stall. Checked all the vacuum hoses etc for leaks.
Is there any relation to cleaning the throttle body, and the idle control going out of whack? I also got a code 121 for the maf soon as I tried to start it after, and it won;t go away after resetting the code. Tried disconnecting the battery for an hour to reset the ecu as well.
Is there any way to check the maf to troubleshoot it before buying another?
Will try cleaning the iac maybe, but it seems clean inside.
Also, could the throttle positioning sensor be crazy now, somehow? This all started after I cleaned the throttlebody, it ran great before that.
It seems to run a bit rich, so am inclined to think it needs less fuel and more air maybe.
Any help appreciated.






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