I clean mine primarily because I use a oiled air filter, and afet i clean the filter and reoil it, and sometimes the Xtra oil finds it way onto the MAF sensor immediatly behind the air filter housing.

here is how to do it:
1. unplug the electrical connection on the sensor
2. remove the sensor from the sensor housing with the two torx screws on the top of the sensor where the harness plugs in
3. gently pull the sensor straight up nad out of the housing
4. don't touch the sensor wire with your fingers they may be oily
5. use Q-tips and isopropal alcohol to clean the sensor element (wire) just takes a couple of wipes. let it dry for a minute and reinstall

A friend who owns a Indy shop does this all the time at his shop/ the alternative is to replace the sensor. He tells me to only use Alcohol, no thinner or carb cleaner it can damage the platinum element.

after i cleaned mine the first time the idle immediatly smoothed out (the sensor had dirt/oil build up on it. The sensor is supposed to be self cleaning when it heats up, but i have found that is not really self cleaning and a little alcohol goes a long way.

Dan